公开(公告)号：US20240177286A1

公开(公告)日：2024-05-30

申请号：US18070744

申请日：2022-11-29

Applicant: APPLIED MATERIALS, INC.

Inventor： Yuanhong Guo ,  Sachin Dangayach ,  Rahul Reddy Komatireddi ,  Tianyuan Wu

IPC: G06T7/00 ,  G01N21/95

CPC classification number: G06T7/0004 ,  G01N21/9501 ,  G06T2207/30148

Abstract: The subject matter of this specification can be implemented in, among other things, methods, systems, computer-readable storage medium. A method can include a processing device storing a plurality of feature vectors representative of previously processed image frames that correspond to various substrate processing defects. The method further includes receiving first image data comprising one or more image frames indicative of a first substrate processing defect. The method further includes determining a first feature vector corresponding to the first image data. The method further includes determining a selection of the plurality of feature vectors based on a proximity between the first feature vector and each of the selection of the plurality of feature vectors. The method further includes determining second image data comprising one or more image frames corresponding to the selection of the plurality of embedding vectors and performing an action based on determining the second image data.