公开(公告)号：US20230051800A1

公开(公告)日：2023-02-16

申请号：US17759257

申请日：2021-01-27

Applicant: APPLIED MATERIALS, INC.

Inventor： YIKAI CHEN ,  ANIRUDDHA PAL ,  SAURABH M. CHAUDHARI ,  YAO-HUNG YANG ,  SIAMAK SALIMIAN ,  TOM K. CHO

IPC: C23C4/10 ,  C23C4/134 ,  C04B35/565 ,  C04B35/622

Abstract: Methods and apparatus for producing bulk silicon carbide and producing silicon carbide coatings are provided herein. The method includes feeding a mixture of silicon carbide and ceramic into a plasma sprayer. The plasma generates a stream towards a substrate forming a bulk material or optionally a coating on the substrate such as an article upon contact therewith. In embodiments, the substrate can be removed, leaving a component part fabricated from bulk silicon carbide.