公开(公告)号：US20190026879A1

公开(公告)日：2019-01-24

申请号：US15655796

申请日：2017-07-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Amit BATIKOFF ,  Doron PORTNOY

IPC: G06T7/00 ,  G06T5/50 ,  G06T5/00 ,  G06K9/62

CPC classification number: G06T7/001 ,  G06K9/6202 ,  G06K9/6215 ,  G06T5/006 ,  G06T5/009 ,  G06T5/50 ,  G06T2207/10024 ,  G06T2207/30148

Abstract: A method, system, and computer program product of detecting defects in an object using a processor operatively connected to a memory, the method comprising: accommodating in the memory an image group comprising a reference image and an image; generating a set of correction parameters to be applied to pixels of an image from the image group, wherein the parameters are determined to minimize a combination of a first factor indicative of variability of the set, and a second factor indicative of a difference between an image from the image group as enhanced by applying the set and another image in the image group, wherein the combination increases as any factor increases; applying the set to the image of the image group to obtain an enhanced image; generating an optimal difference image between the enhanced image and the other image; and using the optimal difference image for detecting defect candidates.