公开(公告)号：US10430938B2

公开(公告)日：2019-10-01

申请号：US15655796

申请日：2017-07-20

申请人： APPLIED MATERIALS ISRAEL LTD.

发明人： Amit Batikoff ,  Doron Portnoy

IPC分类号： G06K9/00 ,  G06T7/00 ,  G06T5/50 ,  G06T5/00 ,  G06K9/62

摘要： A method, system, and computer program product of detecting defects in an object using a processor operatively connected to a memory, the method comprising: accommodating in the memory an image group comprising a reference image and an image; generating a set of correction parameters to be applied to pixels of an image from the image group, wherein the parameters are determined to minimize a combination of a first factor indicative of variability of the set, and a second factor indicative of a difference between an image from the image group as enhanced by applying the set and another image in the image group, wherein the combination increases as any factor increases; applying the set to the image of the image group to obtain an enhanced image; generating an optimal difference image between the enhanced image and the other image; and using the optimal difference image for detecting defect candidates.