公开(公告)号：US20190066291A1

公开(公告)日：2019-02-28

申请号：US15683726

申请日：2017-08-22

申请人： APPLIED MATERIALS ISRAEL LTD.

发明人： Limor MARTIN ,  Elad COHEN ,  Eyal NEISTEIN ,  Moshe AMZALEG

IPC分类号： G06T7/00 ,  G06T5/00

CPC分类号： G06T7/0008 ,  G01N21/95607 ,  G06T5/002 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/20224 ,  G06T2207/30148 ,  H01L21/67288 ,  H01L22/12

摘要： There are provided system and method of detecting defects on a specimen, the method comprising: capturing a first image from a first die and obtaining one or more second images; receiving: i) a first set of predefined first descriptors each representing a type of DOI, and ii) a second set of predefined second descriptors each representing a type of noise; generating at least one difference image based on difference between pixel values of the first image and pixel values derived from the second images; generating at least one third image, comprising: computing a value for each given pixel of at least part of the at least one difference image based on the first and second sets of predefined descriptors, and surrounding pixels centered around the given pixel; and determining presence of defect candidates based on the at least one third image and a predefined threshold.