公开(公告)号：US11449979B2

公开(公告)日：2022-09-20

申请号：US17067566

申请日：2020-10-09

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Vladislav Kaplan ,  Angela Kravtsov ,  Shimon Halevi ,  Utkarsh Rawat

IPC: G06K9/00 ,  G06T7/00 ,  G01N23/2251 ,  G06T5/00

Abstract: There is provided a method, a non-transitory computer readable medium, and a system for measuring a pattern. The method can include (a) obtaining an electron image of an area of a sample, the area comprises the pattern, the electron image comprises multiple lines; each line comprises information obtained by moving an electron beam over a scan line; (b) generating a converted image by applying a noise reduction kernel on the electron image, the noise reduction kernel has a width that represents a number of consecutive lines of the electron image; the width is determined based on relationships between analysis results obtained when using noise reduction kernels of different widths; and (c) analyzing the converted image to provide a pattern measurement.

公开(公告)号：US20220114721A1

公开(公告)日：2022-04-14

申请号：US17067566

申请日：2020-10-09

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Vladislav Kaplan ,  Angela Kravtsov ,  Shimon Halevi ,  Utkarsh Rawat

IPC: G06T7/00 ,  G01N23/2251 ,  G06T5/00

Abstract: There is provided a method, a non-transitory computer readable medium, and a system for measuring a pattern. The method can include (a) obtaining an electron image of an area of a sample, the area comprises the pattern, the electron image comprises multiple lines; each line comprises information obtained by moving an electron beam over a scan line; (b) generating a converted image by applying a noise reduction kernel on the electron image, the noise reduction kernel has a width that represents a number of consecutive lines of the electron image; the width is determined based on relationships between analysis results obtained when using noise reduction kernels of different widths; and (c) analyzing the converted image to provide a pattern measurement.