公开(公告)号：US20250115995A1

公开(公告)日：2025-04-10

申请号：US18904480

申请日：2024-10-02

Applicant: ASM IP Holding B.V.

Inventor： Iordan Iordanov ,  Jeffrey Hintz ,  Shreyas Parameshwaran ,  Dinkar Nandwana ,  Lee Donohue ,  David Groechel

IPC: C23C16/455 ,  C23C16/44 ,  C23C16/458

Abstract: A fixture includes a first end plate, a threaded member, a second end plate, and a compression member. The first end plate has a first end plate recess. The threaded member is fixed in the first end plate in extends in a direction opposite the first end plate recess. The second end plate has a second end plate recess facing the first end plate recess and is slidably received on the threaded member. The compression member is arranged on a side of the second end plate opposite the first end plate and is threadedly seated on a male threaded segment of the threaded member to reverse flow a purge fluid through a mixing block compressively fixed between the first end plate and the second end plate. Fixture arrangements, methods of making mixing blocks, mixing blocks, and semiconductor processing systems including mixing blocks are also described.