公开(公告)号：US20250112068A1

公开(公告)日：2025-04-03

申请号：US18904907

申请日：2024-10-02

Applicant: ASM IP Holding B.V.

Inventor： Klaas Boonstra ,  Theodorus G.M. Oosterlaken ,  Bram van den Brink ,  Anne Geertruid Maria Spruit

IPC: H01L21/673 ,  C23C16/458

Abstract: A wafer boat system comprising: a carrier extending along a carrier axis and comprising a first end member at a first axial end of the carrier, a second end member at a second axial end of the carrier, and a shell connecting the first end member with the second end member, wherein at least three circumferentially spaced apart axial series of ring support slots are provided to the shell, the ring support slots defining axially spaced apart holder ring positions; and a plurality of holder rings each engageable with the ring support slots to position the holder ring in the carrier at one of the holder ring positions, wherein the holder ring is configured to support a wafer in the carrier, wherein the shell circumferentially interconnects the axial series of slots, wherein axial series of gas transmission openings are formed in the shell between the axial series of slots.