公开(公告)号：US20250132181A1

公开(公告)日：2025-04-24

申请号：US18915971

申请日：2024-10-15

Applicant: ASM IP Holding B.V.

Inventor： Theodorus G.M. Oosterlaken ,  Nimit Kothari ,  Marina de Jager

IPC: H01L21/677 ,  B25J11/00 ,  B25J15/06 ,  H01L21/673 ,  H01L21/683 ,  H01L21/687

Abstract: A semiconductor processing assembly is disclosed with: a wafer handling robot comprising a plurality of end effectors distributed in substantial vertical direction at an end effector pitch and configured to carry wafers; a wafer boat having boat slots distributed in substantial vertical direction and configured to hold wafers to be loaded at a load pitch; a wafer cassette having cassette slots distributed in substantial vertical direction at a cassette pitch and configured to hold wafers; and an electronic controller for controlling at least the wafer handling robot and having a system memory. By having the end effector pitch substantially equal to the cassette pitch, the electronic controller may be configured and programmed with a program in its system memory to control the semiconductor processing assembly to transfer wafers between the cassette slots of the wafer cassette and the boat slots of the wafer boat.