公开(公告)号：US20190301018A1

公开(公告)日：2019-10-03

申请号：US16366202

申请日：2019-03-27

Applicant: ASM International N.V.

Inventor： Chris G.M. de Ridder ,  Lucian C. Jdira ,  Bartholomeus Hans Louis Lindeboom

IPC: C23C16/46 ,  C23C16/458

Abstract: A wafer boat cooldown device comprising a bottom plate and a rotatable table that is rotatable between a number of index positions. The rotatable table comprises at least two wafer boat positions for supporting a wafer boat. A vertically extending wall structure is mounted on the rotatable table and creates, at each wafer boat position, a wafer boat chamber having a gas supply area and a gas discharge area. The wafer boat cooldown device further comprises a plenum chamber which extends under the bottom plate. The plenum chamber accommodates at least one gas/liquid heat exchanger.