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公开(公告)号：US11121014B2
公开(公告)日：2021-09-14
申请号：US16000353
申请日：2018-06-05
Applicant: ASM International N.V.
Inventor： Chris G. M. de Ridder , Theodorus G. M. Oosterlaken , Adriaan Garssen
IPC: H01L21/673 , H01L21/677
Abstract: A dummy wafer storage cassette for storing dummy wafers. The dummy wafer storage cassette may have more than 30 wafer slots for accommodating dummy wafers. The dummy wafer cassette may have substantially the same outer dimensions as a standardized wafer cassette with 25 wafer slots and a pitch of the wafer slots of the dummy wafer storage cassette may be smaller than a pitch between the wafer slots in the standardized wafer cassette.
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