公开(公告)号：US20180113257A1

公开(公告)日：2018-04-26

申请号：US15562883

申请日：2016-04-11

Applicant: ASML HOLDING N.V.

Inventor： Louis Zhongliang LU ,  Tao CHEN ,  Francisco Javier BERRIOS ,  Jiazong ZHANG

IPC: G02B6/26 ,  G02B6/02 ,  G02B6/32 ,  G02B6/42

CPC classification number: G02B6/262 ,  G02B6/02295 ,  G02B6/32 ,  G02B6/4225

Abstract: A system including a first component having a lensed facet; and a second component optically coupled to the first component, the second component having a tapered facet, the tapered facet and lensed facet spaced from each other so as to establish evanescent-wave coupling between the first component and the second component.