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公开(公告)号：US20200319546A1
公开(公告)日：2020-10-08
申请号：US16754865
申请日：2018-08-28
Applicant: ASML NETHERLANDS B.V.
Inventor： Anton Wilhelmus DUYS , Maxim Aleksandrovich NASALEVICH , Arnoud Willem NOTENBOOM , Mária PÉTER , Pieter-Jan VAN ZWOL , David Ferdinand VLES
IPC: G03F1/64
Abstract: A pellicle frame for supporting a pellicle, the frame having a first surface and a second surface opposite the first surface, and a structure provided between the first and the second surfaces, wherein the first and second surfaces and the structure at least partially define at least one volume therebetween that is devoid of the material that forms the frame.
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