公开(公告)号：US20220082126A1

公开(公告)日：2022-03-17

申请号：US17421694

申请日：2019-12-12

Applicant: ASML Netherlands B.V.

Inventor： Erwin Andreas Bernardus MULDER ,  Krijn Frederik BUSTRAAN ,  Antonius Franciscus Johanne DE GROOT ,  Rinze KOOLSTRA ,  Paul Peter Anna Antoniu BROM

IPC: F16C11/12 ,  G03F7/20

Abstract: The invention relates to elastic guiding device to support a mass with respect to a base in a support direction, wherein the stiffness in support direction compared to stiffness in other direction, for example the stiffness in vertical direction compared to the stiffness in horizontal directions is substantially increased. The invention further relates to a positioning device comprising at least one elastic guiding device, and a lithographic apparatus comprising such positioning device.

公开(公告)号：US20230004092A1

公开(公告)日：2023-01-05

申请号：US17778054

申请日：2020-11-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Michael Marinus Anna STEUR ,  Nicolaas TEN KATE ,  Siegfried Alexander TROMP ,  Koen Gerhardus WINKELS ,  Antonius Franciscus Johanne DE GROOT

IPC: G03F7/20 ,  H01L21/687

Abstract: Substrate tables and methods of manufacturing substrate supports for substrate tables. In one arrangement, a plurality of holes are formed through a base member. A burl formation member is joined to the base member. A plurality of burl structures are formed in the burl formation member. Each burl structure includes a distal surface that contacts, in use, a substrate being supported. Each burl structure has an opening to at least one of the holes formed through the base member.