公开(公告)号：US11563298B2

公开(公告)日：2023-01-24

申请号：US17460430

申请日：2021-08-30

Applicant: ASML NETHERLANDS B.V.

Inventor： John Colin Travers ,  Federico Belli ,  Malte Christian Brahms ,  Andreas Johannes Antonius Brouns ,  Ronald Franciscus Herman Hugers

IPC: G02F1/35 ,  G02B6/02 ,  H01S3/067 ,  G03F7/20

Abstract: A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.

公开(公告)号：US12237639B2

公开(公告)日：2025-02-25

申请号：US18085338

申请日：2022-12-20

Applicant: ASML NETHERLANDS B.V.

Inventor： John Colin Travers ,  Federico Belli ,  Malte Christian Brahms ,  Andreas Johannes Antonius Brouns ,  Ronald Franciscus Herman Hugers

IPC: G02B6/02 ,  G02F1/35 ,  G03F7/00 ,  H01S3/067

Abstract: A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.