公开(公告)号：US20230333488A1

公开(公告)日：2023-10-19

申请号：US18027094

申请日：2021-08-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Krijn Frederik BUSTRAAN ,  Arjan GIJSBERTSEN ,  Paul VAN DONGEN ,  Ibrahim ACAN

IPC: G03F7/20

CPC classification number: G03F7/70716

Abstract: A substrate holder to hold a substrate in a substrate holding position, the substrate holder including: a frame, multiple surface clamping devices arranged on the frame to clamp a substrate at an upper surface thereof, wherein the surface clamping devices each have a clamping pad to be arranged on the upper surface of the substrate, the surface clamping pads being movable with respect to each other at least in a first direction substantially perpendicular to the upper surface of a substrate held by the surface clamping pads, and one or more actuators to move the surface clamping pads with respect to each other in the first direction.