公开(公告)号：US20220404711A1

公开(公告)日：2022-12-22

申请号：US17763698

申请日：2020-09-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Ning GU ,  Liping REN ,  Kui-Jun HUANG ,  Jian WU

IPC: G03F7/20 ,  G05B13/02

Abstract: A method for monitoring performance of a manufacturing process is described. The method includes receiving one or more input signals that convey information related to geometry of a substrate generated by the manufacturing process; and determining, with a prediction model, variation in the manufacturing process based on the one or more input signals. A method for predicting substrate geometry associated with a manufacturing process is also described. The method includes receiving input information including geometry information and manufacturing process information for a substrate; and predicting, using a machine learning prediction model, output substrate geometry based on the input information. The method may further include tuning the predicted output substrate geometry. The tuning includes comparing the output substrate geometry to corresponding physical substrate measurements and/or predictions from a different non-machine learning prediction model, generating a loss function based on the comparison, and optimizing the loss function.