公开(公告)号：US20240402622A1

公开(公告)日：2024-12-05

申请号：US18699654

申请日：2022-10-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Johannes Petrus Martinus Bernardus VERMEULEN ,  Johannes Adrianus Leonardus DE GOEIJ ,  René Wilhelmus Antonius Hubertus LEENAARS ,  Bas JANSEN ,  Ron Geeraard Catharina DE BRUIJN

IPC: G03F7/00 ,  F16F1/377 ,  F16F1/44

Abstract: A coupling having a variable stiffness is disclosed. The coupling includes: a deformable component and a support being movably arranged with respect to each other, wherein the deformable component includes a viscoelastic material, wherein the support has a recess configured to receive the deformable component, wherein the deformable component is configured to deform in volumetric deformation when, in use, a force is applied to the deformable component, and wherein a shape of the deformable component and a shape of the support are configured such that the variable stiffness gradually increases as a function of an amount of the force. A stage apparatus may have the coupling.