公开(公告)号：US11467486B2

公开(公告)日：2022-10-11

申请号：US16969211

申请日：2019-02-07

Applicant: ASML NETHERLANDS B.V.

Inventor： Evgenia Kurganova ,  Adrianus Johannes Maria Giesbers ,  Alexander Ludwig Klein ,  Maxim Aleksandrovich Nasalevich ,  Arnoud Willem Notenboom ,  Mária Péter ,  Pieter-Jan Van Zwol ,  David Ferdinand Vles ,  Sten Vollebregt ,  Willem-Pieter Voorthuijzen

IPC: G03F1/62 ,  G03F7/20

Abstract: A catalyst including: a first layer including a transition metal; a base layer; and an interlayer, wherein the interlayer is disposed between the base layer and the first layer is disclosed. Also disclosed are methods for preparing a catalyst as well as for synthesizing graphene, a pellicle produced using the catalyst or methods disclosed herein, as well as a lithography apparatus including such a pellicle.