公开(公告)号：US20230315027A1

公开(公告)日：2023-10-05

申请号：US18013154

申请日：2021-06-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Koos VAN BERKEL ,  Joost Johan BOLDER ,  Stijn BOSMA

IPC: G05B13/02 ,  G06N3/084 ,  G03F7/00

CPC classification number: G05B13/027 ,  G03F7/706841 ,  G06N3/084

Abstract: Variable setpoints and/or other factors may limit iterative learning control for moving components of an apparatus. The present disclosure describes a processor configured to control movement of a component of an apparatus with at least one prescribed movement. The processor is configured to receive a control input such as and/or including a variable setpoint. The control input indicates the at least one prescribed movement for the component. The processor is configured to determine, with a trained artificial neural network, based on the control input, a feedforward output for the component. The artificial neural network is pretrained with a training data set such that the artificial neural network determines the output regardless of whether or not the control input falls outside the training data set. The processor controls the component based on at least the output.