公开(公告)号：US20220197157A1

公开(公告)日：2022-06-23

申请号：US17602616

申请日：2020-03-10

Applicant: ASML Netherlands B.V.

Inventor： Bas JANSEN ,  Samer Abdelmoeti Abuzeid ABDELMOETI ,  Hans BUTLER ,  Koen Johan Frederik LOONEN ,  Aditya SINGH ,  Ruben Etienne Johan Rinus VANDERVELDEN

IPC: G03F7/20

Abstract: The invention relates to an object positioning system including: an actuator system and a measurement system. The actuator system comprises an actuator made of a material with predominantly electrostrictive properties and substantially no net polarization in absence of an electric field. The actuator system is configured to apply an electric field to the actuator, which electric field comprises a bias electric field and an actuation electric field superimposed on the bias electric field, a field strength of said actuation electric field being equal to or smaller than a field strength of the bias electric field. The measurement system is configured to measure an electrical property of the actuator which is representative for a mechanical state of the actuator. The measurement system comprises a bridge circuit including an actuator and a reference element having electrical properties matched to the electrical properties of the actuator.