公开(公告)号：US09964852B1

公开(公告)日：2018-05-08

申请号：US15803448

申请日：2017-11-03

Applicant: ASML Netherlands B.V.

Inventor： Niek Antonius Jacobus Maria Kleemans ,  Denis Alexandrovich Glushkov ,  Ronald Johannes Hultermans ,  Benedictus Mathijs Renkens ,  Gerardus Hubertus Petrus Maria Swinkels ,  Christiaan Johannes Petrus Verspeek

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A source collector apparatus for use in a lithographic apparatus includes a fuel droplet generator configured in use to generate a stream of fuel droplets directed from an outlet of the fuel droplet generator towards a plasma formation location. In order to prevent droplet satellites from interfering with plasma formation, a gas supply is provided that in use provides a flow of gas (e.g., hydrogen) that deflects any droplet satellites out of the fuel droplet stream. Additionally, a detection apparatus may be provided as part of a shroud to determine the point at which coalescence of fuel droplets occurs thereby providing an indication of the likelihood of satellite droplets being present in the fuel droplet stream.

公开(公告)号：US09841680B2

公开(公告)日：2017-12-12

申请号：US14781262

申请日：2014-03-05

Applicant: ASML Netherlands B.V.

Inventor： Niek Antonius Jacobus Maria Kleemans ,  Denis Alexandrovich Glushkov ,  Ronald Johannes Hultermans ,  Benedictus Mathijs Renkens ,  Gerardus Hubertus Petrus Maria Swinkels ,  Christiaan Johannes Petrus Verspeek

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A source collector apparatus for use in a lithographic apparatus includes a fuel droplet generator configured in use to generate a stream of fuel droplets directed from an outlet of the fuel droplet generator towards a plasma formation location. In order to prevent droplet satellites from interfering with plasma formation, a gas supply is provided that in use provides a flow of gas (e.g., hydrogen) that deflects any droplet satellites out of the fuel droplet stream. Additionally, a detection apparatus may be provided as part of a shroud to determine the point at which coalescence of fuel droplets occurs thereby providing an indication of the likelihood of satellite droplets being present in the fuel droplet stream.