公开(公告)号：US10455680B2

公开(公告)日：2019-10-22

申请号：US15057086

申请日：2016-02-29

Applicant: ASML Netherlands B.V.

Inventor： Georgiy Vaschenko ,  Peter Baumgart ,  Chirag Rajyaguru ,  Benjamin Sams ,  Armin Ridinger ,  Janine Kardokus

IPC: C22B3/00 ,  H05G2/00 ,  C22B9/04 ,  C22B25/08 ,  F27B17/00 ,  F27B17/02

Abstract: A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.

公开(公告)号：US20170247778A1

公开(公告)日：2017-08-31

申请号：US15057086

申请日：2016-02-29

Applicant: ASML Netherlands B.V.

Inventor： Georgiy Vaschenko ,  Peter Baumgart ,  Chirag Rajyaguru ,  Benjamin Sams ,  Armin Ridinger ,  Janine Kardokus

IPC: C22B3/00 ,  H05G2/00

CPC classification number: H05G2/008 ,  C22B9/04 ,  C22B25/08 ,  F27B17/00 ,  F27B17/02 ,  H05G2/005

Abstract: A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.

公开(公告)号：US11317501B2

公开(公告)日：2022-04-26

申请号：US16572131

申请日：2019-09-16

Applicant: ASML Netherlands B.V.

Inventor： Georgiy Vaschenko ,  Peter Baumgart ,  Chirag Rajyaguru ,  Benjamin Sams ,  Armin Ridinger ,  Janine Kardokus

IPC: H05G2/00 ,  C22B9/04 ,  F27B17/02 ,  C22B25/08 ,  F27B17/00

Abstract: A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.