公开(公告)号：US11443915B2

公开(公告)日：2022-09-13

申请号：US16649975

申请日：2018-09-21

Applicant: ASML Netherlands B.V.

Inventor： Joe Wang ,  Chia Wen Lin ,  Zhongwei Chen ,  Chang-Chun Yeh

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/22

Abstract: Disclosed herein an apparatus and a method for detecting buried features using backscattered particles. In an example, the apparatus comprises a source of charged particles; a stage; optics configured to direct a beam of the charged particles to a sample supported on the stage; a signal detector configured to detect backscattered particles of the charged particles in the beam from the sample; wherein the signal detector has angular resolution. In an example, the methods comprises obtaining an image of backscattered particles from a region of a sample; determining existence or location of a buried feature based on the image.