公开(公告)号：US20170045832A1

公开(公告)日：2017-02-16

申请号：US15303604

申请日：2015-04-09

Applicant: ASML Netherlands B.V.

Inventor： Freek Theodorus MOLKENBOER ,  Jeremy BURKE ,  Wilhelm CLAUSSEN ,  Alexander Franciscus DEUTZ ,  Jerry Don HODO ,  Cornelia Elizabeth Carolina HULSBOSCH-DAM ,  Edwin TE SLIGTE ,  Mayk VAN DEN HURK

IPC: G03F7/20

CPC classification number: G03F7/70925 ,  G03F7/70033 ,  G03F7/70983

Abstract: Disclosed is a cleaning apparatus configured to clean a radiation transmission assembly (such as a viewport), or part thereof. The radiation transmission assembly provides for radiation transmission to and/or from a low pressure chamber. The cleaning apparatus comprises, a hydrogen radical generator configured to generate hydrogen radicals for use in cleaning said radiation transmission assembly or part thereof, and a connection assembly for connection to said radiation transmission assembly.

Abstract translation: 公开了一种清洁设备，其被配置为清洁辐射传输组件（例如视口）或其一部分。 辐射传输组件提供到和/或从低压室的辐射传输。 清洁装置包括：氢根发生器，其被配置为产生用于清洁所述辐射传输组件或其一部分的氢自由基，以及用于连接到所述辐射传输组件的连接组件。