公开(公告)号：US20250044236A1

公开(公告)日：2025-02-06

申请号：US18843138

申请日：2023-02-17

Applicant: ASML Netherlands B.V.

Inventor： Douglas C. CAPPELLI ,  Ferry ZIJP ,  Bram Antonius Gerardus LOMANS ,  Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN

IPC: G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G02B7/18 ,  G02B7/182

Abstract: An inspection apparatus includes a radiation source, an optical system, and a detector. The radiation source is configured to generate a beam of radiation. The optical system is configured to receive and direct the beam along an optical axis and toward a target so as to produce scattered radiation from the target. The optical system includes a beam displacer. The beam displacer includes two or more reflective surfaces. The beam displacer is configured to receive the beam along the optical axis, perform reflections of the beam so as to displace the optical axis of the beam, move linearly in at least a first dimension to shift the displaced optical axis, and preserve an optical property of the beam such that the optical property is invariant to the linear movement. The detector is configured to receive the scattered radiation and to generate a measurement signal based on the scattered radiation.

公开(公告)号：US20240427251A1

公开(公告)日：2024-12-26

申请号：US18704337

申请日：2022-10-24

Applicant: ASML Netherlands B.V.

Inventor： Douglas C. CAPPELLI

IPC: G03F7/00

Abstract: An inspection apparatus includes a radiation source, an optical system, and a detector. The radiation source generates a beam of radiation. The optical system directs the beam along an optical axis and toward a target so as to produce scattered radiation from the target. The optical system includes a beam displacer including four reflective surfaces having a spatial arrangement. The beam displacer receives the beam along the optical axis, performs reflections of the beam so as to displace the optical axis of the beam, rotates to shift the displaced optical axis, and preserves polarization of the beam such that a polarization state of the beam along the deflected optical axis is invariant to the rotating based on the spatial arrangement of the four reflective surfaces. The detector receives the scattered radiation to generate a measurement signal based on the received scattered radiation.