公开(公告)号：US20250021026A1

公开(公告)日：2025-01-16

申请号：US18711842

申请日：2022-11-18

Applicant: ASML Netherlands B.V.

Inventor： William Peter VAN DRENT ,  Jan Steven Christiaan WESTERLAKEN ,  Daniel Jozef Maria DIRECKS ,  Johannes Henricus Wilhelmus JACOBS ,  Maurice Wilhelmus Leonardus Hendricus FEIJTS ,  Edwin Johan BUIS ,  Bart Leonardus KNAPEN ,  Nicolaas Johannes Wilhelmus REUVERS ,  Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN

IPC: G03F7/00 ,  H05G2/00

Abstract: The present invention relates to an apparatus for supplying a liquid target material to a radiation source, comprising a first reservoir, a pressurizing system configured to pressurize a hydraulic fluid, and a separating device configured to separate the hydraulic fluid from the liquid target material in the first reservoir and to transfer a pressure from the hydraulic fluid to the liquid target material. The invention also relates to an associated method of supplying liquid target material to a radiation source.