公开(公告)号：US11049689B2

公开(公告)日：2021-06-29

申请号：US16559459

申请日：2019-09-03

Applicant: ASML Netherlands B.V.

Inventor： Ehud Shaked ,  Martinus Maassen

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/24 ,  H01J37/14 ,  H01J37/04 ,  H01J37/244 ,  H01J37/147

Abstract: Systems and methods for conducting charged particle beam modulation are disclosed. According to certain embodiments, a charged particle beam apparatus generates a plurality of charged particle beams. A modulator may be configured to receive the plurality of charged particle beams and generate a plurality of modulated charged particle beams. A detector may be configured to receive the plurality of modulated charged particle beams.

公开(公告)号：US20200176219A1

公开(公告)日：2020-06-04

申请号：US16559459

申请日：2019-09-03

Applicant: ASML Netherlands B.V.

Inventor： Ehud Shaked ,  Martinus Maassen

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/244 ,  H01J37/147 ,  H01J37/04

Abstract: Systems and methods for conducting charged particle beam modulation are disclosed. According to certain embodiments, a charged particle beam apparatus generates a plurality of charged particle beams. A modulator may be configured to receive the plurality of charged particle beams and generate a plurality of modulated charged particle beams. A detector may be configured to receive the plurality of modulated charged particle beams.