公开(公告)号：US12007219B2

公开(公告)日：2024-06-11

申请号：US17282141

申请日：2019-09-09

Applicant: ASML Netherlands B.V.

Inventor： Erwin Van Dorp

IPC: G01B11/06 ,  G01B21/04 ,  G01C3/08

CPC classification number: G01B11/0608 ,  G01B21/042 ,  G01C3/08

Abstract: The invention provides an apparatus configured for determining a distance of the apparatus to an object according to the principle of triangulation. The apparatus comprises a transmissive device with a predefined distance between a first surface and a second surface of the transmissive device, and a detector that is configured to receive at least a portion of a radiation beam after interaction with the transmissive device and the object. The first surface is arranged to reflect a first part of the radiation beam, and the second surface is arranged to reflect a second part of the radiation beam. The predefined distance is used for determining the distance of the apparatus to the object.