公开(公告)号：US20240331115A1

公开(公告)日：2024-10-03

申请号：US18577678

申请日：2022-06-02

Applicant: ASML Netherlands B.V.

Inventor： Haoyi LIANG ,  Zhichao CHEN ,  Lingling PU ,  Fang-Cheng CHANG ,  Liangjiang YU ,  Zhe WANG

IPC: G06T5/80 ,  G06T7/00 ,  G06T7/33

CPC classification number: G06T5/80 ,  G06T7/001 ,  G06T7/337 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/30148

Abstract: An improved systems and methods for correcting distortion of an inspection image are disclosed. An improved method for correcting distortion of an inspection image comprises acquiring an inspection image, aligning a plurality of patches of the inspection image based on a reference image corresponding to the inspection image, evaluating, by a machine learning model, alignments between each patch of the plurality of patches and a corresponding patch of the reference image, determining local alignment results for the plurality of patches of the inspection image based on a reference image corresponding to the inspection image, determining an alignment model based on the local alignment results, and correcting a distortion of the inspection image based on the alignment model.