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公开(公告)号:US20240331115A1
公开(公告)日:2024-10-03
申请号:US18577678
申请日:2022-06-02
Applicant: ASML Netherlands B.V.
Inventor: Haoyi LIANG , Zhichao CHEN , Lingling PU , Fang-Cheng CHANG , Liangjiang YU , Zhe WANG
CPC classification number: G06T5/80 , G06T7/001 , G06T7/337 , G06T2207/10061 , G06T2207/20081 , G06T2207/30148
Abstract: An improved systems and methods for correcting distortion of an inspection image are disclosed. An improved method for correcting distortion of an inspection image comprises acquiring an inspection image, aligning a plurality of patches of the inspection image based on a reference image corresponding to the inspection image, evaluating, by a machine learning model, alignments between each patch of the plurality of patches and a corresponding patch of the reference image, determining local alignment results for the plurality of patches of the inspection image based on a reference image corresponding to the inspection image, determining an alignment model based on the local alignment results, and correcting a distortion of the inspection image based on the alignment model.