公开(公告)号：US20210079971A1

公开(公告)日：2021-03-18

申请号：US16772406

申请日：2018-11-15

Applicant: ASML Netherlands B.V.

Inventor： Derk TEN HOOPEN ,  Francois-Xavier DEBIESME ,  Eric Pierre-Yves VENNAT

IPC: F16F9/30 ,  F16F9/32 ,  G03F7/20

Abstract: The invention relates a method for manufacturing a damper device including a first part and a second part, said method comprising the following steps: a) providing a damping material in a space in between the first part and the second part, such that the damping material is in a compressed state in the space; and b) heating the device to a predetermined temperature in order to adhere the damping material to the first part and the second part.