公开(公告)号：US09669334B2

公开(公告)日：2017-06-06

申请号：US14674724

申请日：2015-03-31

Applicant: ASML Netherlands B.V.

Inventor： Igor V. Fomenkov ,  William N. Partlo ,  Gregory O. Vaschenko ,  William Oldham

IPC: A61N5/06 ,  B01D29/56 ,  B22F3/105 ,  H05G2/00 ,  H05H1/46

CPC classification number: B01D29/56 ,  B22F3/105 ,  H05G2/006 ,  H05G2/008 ,  H05H1/46

Abstract: A filter is used in a target material supply apparatus and includes a sheet having a first flat surface and a second opposing flat surface, and a plurality of through holes. The first flat surface is in fluid communication with a reservoir that holds a target mixture that includes a target material and non-target particles. The through holes extend from the second flat surface and are fluidly coupled at the second flat surface to an orifice of a nozzle. The sheet has a surface area that is exposed to the target mixture, the exposed surface area being at least a factor of one hundred less than an exposed surface area of a sintered filter having an equivalent transverse extent to that of the sheet.

公开(公告)号：US20150209701A1

公开(公告)日：2015-07-30

申请号：US14674724

申请日：2015-03-31

Applicant: ASML Netherlands B.V.

Inventor： Igor V. Fomenkov ,  William N. Partlo ,  Gregory O. Vaschenko ,  William Oldham

IPC: B01D29/56 ,  H05H1/46 ,  H05G2/00

CPC classification number: B01D29/56 ,  B22F3/105 ,  H05G2/006 ,  H05G2/008 ,  H05H1/46

Abstract: A filter is used in a target material supply apparatus and includes a sheet having a first flat surface and a second opposing flat surface, and a plurality of through holes. The first flat surface is in fluid communication with a reservoir that holds a target mixture that includes a target material and non-target particles. The through holes extend from the second flat surface and are fluidly coupled at the second flat surface to an orifice of a nozzle. The sheet has a surface area that is exposed to the target mixture, the exposed surface area being at least a factor of one hundred less than an exposed surface area of a sintered filter having an equivalent transverse extent to that of the sheet.

Abstract translation: 在目标材料供给装置中使用过滤器，并且包括具有第一平面和第二相对平坦面的片，以及多个通孔。 第一平坦表面与储存包含目标材料和非目标颗粒的目标混合物的储存器流体连通。 通孔从第二平坦表面延伸并且在第二平坦表面处流体耦合到喷嘴的孔口。 片材具有暴露于目标混合物的表面积，暴露的表面积比具有与片材相当的横向程度的烧结过滤器的暴露表面积至少要低一百倍。