公开(公告)号：US20240012341A1

公开(公告)日：2024-01-11

申请号：US18252294

申请日：2021-10-14

Applicant: ASML Netherlands B.V.

Inventor： Gustaaf Galein VAN EDEN ,  Cung Vuong NGUYEN ,  Ksenia Sergeevna MAKARENKO

IPC: G03F7/00 ,  H01L21/683

CPC classification number: G03F7/70708 ,  H01L21/6833

Abstract: An electrostatic clamp for holding an object by electrostatic force is disclosed. The electrostatic clamp comprises a dielectric member having a plurality of conductive burls extending from a surface to define a plane in which the object is held, and a conductive element extending between and connecting the plurality of burls. The conductive element is disposed within one or more trenches formed on the surface of the dielectric member. Also disclosed is a method of manufacturing the electrostatic clamp.