公开(公告)号：US20220392729A1

公开(公告)日：2022-12-08

申请号：US17891913

申请日：2022-08-19

Applicant: ASML Netherlands B.V.

Inventor： Arjen Benjamin STORM ,  Johan Frederik Cornelis VAN GURP ,  Henri Kristian ERVASTI ,  Aaron Yang-Fay AYAL ,  Stijn Wilem Herman Karel STEENBRINK ,  Marco Jan-Jaco WIELAND

IPC: H01J9/42 ,  H01J37/244

Abstract: Disclosed herein is an electron-optical assembly testing system for testing an electron-optical assembly, the system comprising: a source of charged particles configured to emit a beam of charged particles; an electron-optical assembly holder configured to hold an electron-optical assembly to be tested such that, when the system is in use with an electron-optical assembly held by the electron-optical assembly holder, the electron-optical assembly is illuminated by the beam; and a sub-beam detector for detecting sub-beams of charged particles that have been transmitted through the electron-optical assembly.