公开(公告)号：US20200303158A1

公开(公告)日：2020-09-24

申请号：US16870747

申请日：2020-05-08

Applicant: ASML Netherlands B.V.

Inventor： Niels Johannes Maria Bosch ,  Peter Paul Hempenius ,  Sven Antoin Johan HOL ,  Marcel Koenrood Marie Baggen

IPC: H01J37/20 ,  H01J37/09 ,  H01J37/304

Abstract: The invention relates to a particle beam apparatus comprising: a particle beam source configured to generate a particle beam; a magnetic coil configured to emit a magnetic field to manipulate the particle beam; an object table configured to hold a substrate; a positioning device comprising ferromagnetic material, the positioning device further comprising at least one motor configured to position the object table with respect to the particle beam; and a controller configured to provide a control signal to the at least one motor to at least partly compensate for a magnetic force induced by the magnetic field acting on the positioning device.