公开(公告)号：US20150212435A1

公开(公告)日：2015-07-30

申请号：US14419640

申请日：2013-08-15

Applicant: ASML NETHERLANDS B.V.

Inventor： Henrikus Herman Marie Cox ,  Mark Marcus Gerardus Heeren ,  Peter Michel Silvester Mar Heijmans ,  Jacob Jan Velten ,  Johannes Hubertus Antonius Van De Rijdt ,  Godfried Katharina Hubertus Franciscu Geelen ,  Abdelhamid Kechroud

IPC: G03F9/00 ,  H02K41/035 ,  H02K1/06

CPC classification number: G03F9/7096 ,  G03F7/70758 ,  G03F2009/005 ,  H02K1/06 ,  H02K9/22 ,  H02K41/035 ,  H02K41/0356 ,  H02K2201/18 ,  H02K2213/03 ,  H02K2213/12

Abstract: An electromagnetic actuator includes a coil assembly including a coil; a magnet assembly including a first and a second magnet unit, each magnet unit including a magnetic yoke and a plurality of permanent magnets mounted to the magnetic yoke, the first and second magnet unit forming a magnetic circuit for receiving the coil assembly and, upon energizing the coil, generating a force in a first direction; and a holder for holding the magnet units, wherein a weight ratio of the magnet assembly over the coil assembly is smaller than the weight ratio of the magnet assembly over the coil assembly when the ratio of force over electrical power is maximized.

Abstract translation: 电磁致动器包括：线圈组件，其包括线圈; 包括第一和第二磁体单元的磁体组件，每个磁体单元包括磁轭和安装在磁轭上的多个永磁体，第一和第二磁体单元形成用于接收线圈组件的磁路，并且在通电时 所述线圈在第一方向上产生力; 以及用于保持磁体单元的保持器，其中当电力上的力比达到最大时，磁体组件超过线圈组件的重量比小于线圈组件上的磁体组件的重量比。

公开(公告)号：US10114300B2

公开(公告)日：2018-10-30

申请号：US14419640

申请日：2013-08-15

Applicant: ASML Netherlands B.V.

Inventor： Henrikus Herman Marie Cox ,  Mark Marcus Gerardus Heeren ,  Peter Michel Silvester Maria Heijmans ,  Jacob Jan Velten ,  Johannes Hubertus Antonius Van De Rijdt ,  Godfried Katharina Hubertus Franciscus Geelen ,  Abdelhamid Kechroud

IPC: G03F9/00 ,  G03F7/20 ,  H02K41/035 ,  H02K9/22 ,  H02K1/06

Abstract: An electromagnetic actuator includes a coil assembly including a coil; a magnet assembly including a first and a second magnet unit, each magnet unit including a magnetic yoke and a plurality of permanent magnets mounted to the magnetic yoke, the first and second magnet unit forming a magnetic circuit for receiving the coil assembly and, upon energizing the coil, generating a force in a first direction; and a holder for holding the magnet units, wherein a weight ratio of the magnet assembly over the coil assembly is smaller than the weight ratio of the magnet assembly over the coil assembly when the ratio of force over electrical power is maximized.