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公开(公告)号：US20200033734A1
公开(公告)日：2020-01-30
申请号：US16500460
申请日：2018-03-08
Applicant: ASML Netherlands B.V.
Inventor： Marco, Matheus, Louis Steeghs , Tian Gang , Mehdi Yousefi Moghaddam
Abstract: A mirror array, at least some of the mirrors of the array comprising a reflective surface and an arm which extends from a surface opposite to the reflective surface, wherein the mirror array further comprises a support structure provided with a plurality of sensing apparatuses, the sensing apparatuses being configured to measure gaps between the sensing apparatuses and the arms which extend from the mirrors.
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