公开(公告)号：US10545414B2

公开(公告)日：2020-01-28

申请号：US15767524

申请日：2016-10-26

Applicant: ASML Netherlands B.V.

Inventor： Alexander Petrus Josephus Van Lankvelt ,  Ingmar August Kerp ,  Richardus Simon Antonius Oostveen ,  Marco Hendrikus Hermanus Oude Nijhuis ,  Robertus Mathijs Gerardus Rijs ,  Olav Johannes Seijger ,  Alexander Maurice Steenhoek

IPC: G03B27/42 ,  B64C17/06 ,  G03F7/20 ,  F16F15/02 ,  F16J15/52

Abstract: The invention relates to a vibration isolation system (VIS) comprising: —a base (10); —a coupling element (20) to be coupled to a vibration sensitive object; —a vibration isolator (30-34) arranged between the base and the coupling element; —a bellows (50) to be arranged between the VIS coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; and —one or more separate damping elements to act on convolutions of the bellows.

公开(公告)号：US10782620B2

公开(公告)日：2020-09-22

申请号：US15774893

申请日：2016-11-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexander Petrus Josephus Van Lankvelt ,  Olav Johannes Seijger

IPC: G03B27/68 ,  G03F7/20 ,  F03G3/06 ,  F16F7/10 ,  F16F15/04

Abstract: The invention provides a vibration isolation device configured to support a structure, comprising:an air mount having a base part mounted on a reference structure and a vibration isolated part, andan inverted pendulum device, wherein a lower end of the inverted pendulum device is mounted on the vibration isolated part of the air mount and an upper end of the inverted pendulum device support the structure to be supported,wherein the vibration isolation device comprises a stiffness adjustment device configured to adjust the stiffness of the inverted pendulum device.