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公开(公告)号：US20190265594A1
公开(公告)日：2019-08-29
申请号：US16318303
申请日：2017-06-22
Applicant: ASML Netherlands B.V.
Inventor： Michel RIEPEN , Paul BROM , Ronald Johannes HULTERMANS
Abstract: A debris mitigation system for use in a radiation source. The debris mitigation system comprises a contamination trap. The contamination trap comprises a debris receiving surface arranged to receive liquid metal fuel debris emitted from a plasma formation region of the radiation source. The debris receiving surface is constructed from a material that reacts with the liquid metal fuel debris to form an intermetallic layer on the debris receiving surface.
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