公开(公告)号：US10816910B2

公开(公告)日：2020-10-27

申请号：US16079169

申请日：2017-02-03

Applicant: ASML Netherlands B.V.

Inventor： Hans Butler ,  Cornelius Adrianus Lambertus De Hoon ,  Fransiscus Mathijs Jacobs ,  Pavel Kagan ,  Jeroen Pieter Starreveld ,  Maurice Willem Jozef Etienne Wijckmans

IPC: G03F7/20 ,  F16F9/02 ,  F16F15/023 ,  F16F13/00 ,  F16F15/027

Abstract: The invention relates to a vibration isolator, comprising: a base; a coupling element to be coupled to a vibration sensitive object; a decoupling mass; a first vibration isolator part arranged between the base and the decoupling mass; and a second vibration isolator part arranged between the decoupling mass and the coupling element, and wherein at least one of the first and second vibration isolator part comprises a pneumatic isolator.

公开(公告)号：US20190049852A1

公开(公告)日：2019-02-14

申请号：US16079169

申请日：2017-02-03

Applicant: ASML Netherlands B.V.

Inventor： Hans Butler ,  Cornelius Adrianus Lambertus De Hoon ,  Fransiscus Mathijs Jacobs ,  Pavel Kagan ,  Jeroen Pieter Starreveld ,  Maurice Willem Jozef Etienne Wijckmans

IPC: G03F7/20 ,  F16F13/00 ,  F16F9/02 ,  F16F15/023

Abstract: The invention relates to a vibration isolator, comprising: a base; a coupling element to be coupled to a vibration sensitive object; a decoupling mass; a first vibration isolator pan arranged between the base and the decoupling mass; and a second vibration isolator part arranged between the decoupling mass and the coupling element, and wherein at least one of the first and second vibration isolator part comprises a pneumatic isolator.