公开(公告)号：US11442369B2

公开(公告)日：2022-09-13

申请号：US16763487

申请日：2018-11-07

申请人： ASML Netherlands B.V.

发明人： Yang-Shan Huang ,  Pieter Cornelis Johan De Jager ,  Rob Reilink ,  Christiaan Louis Valentin ,  Jasper Leonardus Johannes Scholten ,  Antonie Hendrik Verweij ,  Edwin Van Horne

IPC分类号： G03F7/20

摘要： An object stage bearing system can include an object stage, a hollow shaft coupled to the object stage, and an in-vacuum gas bearing assembly coupled to the hollow shaft and the object stage. The in-vacuum gas bearing assembly can include a gas bearing, a scavenging groove, and a vacuum groove. The gas bearing is disposed along an inner wall of the in-vacuum gas bearing assembly and along an external wall of the hollow shaft. The scavenging groove is disposed along the inner wall such that the scavenging groove is isolated from the gas bearing. The vacuum groove is disposed along the inner wall such that the vacuum groove is isolated from the scavenging groove and the gas bearing.