公开(公告)号：US11650576B2

公开(公告)日：2023-05-16

申请号：US16479199

申请日：2018-01-15

Applicant: ASML Netherlands B.V.

Inventor： Wei Fang ,  Cho Huak Teh ,  Robeter Jian ,  Yi-Ying Wang ,  Shih-Tsung Chen ,  Jian-Min Liao ,  Chuan Li ,  Zhaohui Guo ,  Pang-Hsuan Huang ,  Shao-Wei Lai ,  Shih-Tsung Hsu

IPC: G06T7/00 ,  G06K9/62 ,  G06N5/02 ,  G05B19/418 ,  G06F18/24

CPC classification number: G05B19/41875 ,  G06F18/24 ,  G06N5/02 ,  G06T7/0004 ,  G06T2207/30148

Abstract: A server for knowledge recommendation for defect review. The server includes a processor electronically coupled to an electronic storage device storing a plurality of knowledge files related to wafer defects. The processor is configured to execute a set of instruction to cause the server to: receive a request for knowledge recommendation for inspecting an inspection image from a defect classification server; search for a knowledge file in the electronic storage device that matches the inspection image; and transmit the search result to the defect classification server.