公开(公告)号：US20220059311A1

公开(公告)日：2022-02-24

申请号：US17408267

申请日：2021-08-20

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG ,  Rui-Ling LAI ,  Nickolay STEPANENKO ,  Jan BEX ,  Ronny HENDRIX ,  Lidewij Elisa CORNELISSEN ,  Robert Anton BROOKHUIS

IPC: H01J37/16 ,  H05K1/02 ,  H05K1/03

Abstract: Detector modules, systems and methods for detecting signal beams are disclosed using a detector module and a support comprising a feedthrough.
Furthermore, apparatuses, systems, and methods for sealing a vacuum system configured to provide an atmospheric environment and a vacuum chamber environment are disclosed. In some embodiments, a printed circuit board (PCB) comprising a first side for exposing to the atmospheric environment and a second side for exposing to the vacuum chamber environment and for covering an aperture in the vacuum chamber environment, wherein the second side is opposite to the first side. The apparatuses, systems, and methods may include a rigid body on the first side of the PCB and a device connected to the second side of the PCB and positioned on a portion of the PCB that covers the aperture. The PCB may be configured to provide an interface between the device and the rigid body.