公开(公告)号：US20170199469A1

公开(公告)日：2017-07-13

申请号：US15324264

申请日：2015-07-10

Applicant: ASML Netherlands B.V.

Inventor： Johannes Adrianus Antonius Theodorus DAMS ,  Dirk Hendrikus Marinus ENGELEN ,  Peter Michel Silvester Maria HEIJMANS ,  Simon Bernardus Cornelis Maria MARTENS ,  Hans BUTLER ,  Antonius Franciscus Johannes DE GROOT

IPC: G03F7/20 ,  H02K41/03 ,  H02K11/30 ,  H02K11/21 ,  H02K15/06

CPC classification number: G03F7/70758 ,  H02K11/21 ,  H02K11/30 ,  H02K15/06 ,  H02K41/031 ,  H02K2201/18

Abstract: An actuator includes coil assemblies arranged in an array, wherein each coil assembly defines a core chamber having a core chamber height; and at least one magnetic member that extends partly along the core chamber height of the core chamber of a corresponding at least one coil assembly, wherein the at least one magnetic member is made of a magnetic material. A shape of the at least one magnetic member, a size of the at least one magnetic member, a position of the at least one magnetic member and/or the magnetic material of the at least one magnetic member may be selected so as to control one or more parameters of the actuator.