公开(公告)号：US20180267410A1

公开(公告)日：2018-09-20

申请号：US15921124

申请日：2018-03-14

Applicant: ASML Netherlands B.V.

Inventor： Peter Paul HEMPENIUS ,  Marcel Koenraad Marie BAGGEN ,  Thomas Jan DE HOOG ,  Sinar JULIANA ,  Henricus Martinus Johannes VAN DE GROES

IPC: G03F7/20

Abstract: Disclosed is a stage system and metrology apparatus comprising at least one such stage system. The stage system comprises a stage carrier for holding an object and a stage carrier positioning actuator for displacing the stage carrier. The stage system also comprises a balance mass to counteract a displacement of the stage carrier, and a balance mass positioning actuator for displacing the balance mass. A cable arrangement is connected to the stage carrier for the supply of at least power to said stage carrier. The stage system is operable to apply a compensatory feed-forward force to the balance mass which compensates for a cable arrangement force exerted by the cable arrangement.