公开(公告)号：US20220230841A1

公开(公告)日：2022-07-21

申请号：US17579309

申请日：2022-01-19

Applicant: ATTOLIGHT AG

Inventor： Matthew J. Davies

IPC: H01J37/244 ,  H01J37/22

Abstract: A wafer having μLEDs is inspected using cathodoluminescence microscopes. A fast scan is enabled by splitting the CL beam into several beams and sensing the beams with point detectors. Optical filters are inserted in the optical path upstream of the detectors, such that each detector senses a different frequency band. The signals are ratioed and the ratios are compared to expected reference. Regions of extreme value are identified and, if desired, a high resolution scan is performed on the regions or a sample of the regions. Viability score is calculated for each identified region.

公开(公告)号：US12014896B2

公开(公告)日：2024-06-18

申请号：US17579309

申请日：2022-01-19

Applicant: ATTOLIGHT AG

Inventor： Matthew J. Davies

IPC: H01J37/244 ,  H01J37/22

CPC classification number: H01J37/244 ,  H01J37/228

Abstract: A wafer having μLEDs is inspected using cathodoluminescence microscopes. A fast scan is enabled by splitting the CL beam into several beams and sensing the beams with point detectors. Optical filters are inserted in the optical path upstream of the detectors, such that each detector senses a different frequency band. The signals are ratioed and the ratios are compared to expected reference. Regions of extreme value are identified and, if desired, a high resolution scan is performed on the regions or a sample of the regions. Viability score is calculated for each identified region.