专利检索 ap:("Abdallah Ougazzaden" OR "Justin Larry Peticolas, Jr." OR "Andrei Sirenko") AND inv:"Justin Larry Peticolas, Jr." 第 1 页

1.

发明授权
Monolithic optical device manufacturing and integration methods 有权

公开(公告)号：US06780241B2

公开(公告)日：2004-08-24

申请号：US10255354

申请日：2002-09-26

申请人： Abdallah Ougazzaden , Justin Larry Peticolas, Jr. , Andrei Sirenko

发明人： Abdallah Ougazzaden , Justin Larry Peticolas, Jr. , Andrei Sirenko

IPC分类号： C30B2504

CPC分类号： G02B6/136 , G02B6/12004

摘要： The present invention provides methods of manufacturing and integrating optical devices. In one embodiment, a method of integrating an optical device may include forming a first device over a substrate, and forming a second device over the substrate and adjacent the first device with a deposition gas having an etchant selective to a deposited component of the deposition gas.