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公开(公告)号:US20100034962A1
公开(公告)日:2010-02-11
申请号:US12539041
申请日:2009-08-11
申请人: Ahn-Ho LEE , Baik-Soon CHOI , Seung-Hyun AHN , Sang-Tae KIM , Yong-II KIM , Shi-Jin SUNG , Kyong-Ho LEE
发明人: Ahn-Ho LEE , Baik-Soon CHOI , Seung-Hyun AHN , Sang-Tae KIM , Yong-II KIM , Shi-Jin SUNG , Kyong-Ho LEE
IPC分类号: B05D3/10
CPC分类号: G03F7/168
摘要: In a thinner composition and a method of forming a photosensitive film, the thinner composition includes about 50 to about 90% by weight of propylene glycol monomethyl ether acetate, about 1 to about 20% by weight of propylene glycol monomethyl ether, about 1 to about 10% by weight of γ-butyrolactone, and about 1 to about 20% by weight of n-butyl acetate. The thinner composition may have a proper volatility and an improved ability to dissolve various types of photosensitive materials, and thus the thinner composition may be usefully employed in an edge bead rinse process, a rework process or a pre-wetting process.
摘要翻译: 在较薄的组合物和形成感光膜的方法中,较薄的组合物包括约50至约90重量%的丙二醇单甲醚乙酸酯,约1至约20重量%的丙二醇单甲醚,约1至约 10重量%的γ-丁内酯和约1至约20重量%的乙酸正丁酯。 更薄的组合物可以具有适当的挥发性和改善溶解各种感光材料的能力,因此较薄的组合物可有效地用于边缘珠漂洗工艺,返工工艺或预润湿工艺。