公开(公告)号：US08401272B2

公开(公告)日：2013-03-19

申请号：US11888827

申请日：2007-08-02

Applicant: Ajharali Amanullah ,  Lin Jing ,  Chunlin Luke Zeng

Inventor： Ajharali Amanullah ,  Lin Jing ,  Chunlin Luke Zeng

IPC: G06K9/00

CPC classification number: G01N21/95607 ,  G01N21/9501

Abstract: A system for inspecting semiconductor devices is provided. The system includes a region system selecting a plurality of regions from a semiconductor wafer. A golden template system generates a region golden template for each region, such as to allow a die image to be compared to golden templates from a plurality of regions. A group golden template system generates a plurality of group golden templates from the region golden templates, such as to allow the die image to be compared to golden templates from a plurality of group golden templates.

公开(公告)号：US20090034831A1

公开(公告)日：2009-02-05

申请号：US11888827

申请日：2007-08-02

Applicant: Ajharali Amanullah ,  Lin Jing ,  Chunlin Luke Zeng

Inventor： Ajharali Amanullah ,  Lin Jing ,  Chunlin Luke Zeng

IPC: G06K9/00

CPC classification number: G01N21/95607 ,  G01N21/9501

Abstract: A system for inspecting semiconductor devices is provided. The system includes a region system selecting a plurality of regions from a semiconductor wafer. A golden template system generates a region golden template for each region, such as to allow a die image to be compared to golden templates from a plurality of regions. A group golden template system generates a plurality of group golden templates from the region golden templates, such as to allow the die image to be compared to golden templates from a plurality of group golden templates.

Abstract translation: 提供了一种用于检查半导体器件的系统。 该系统包括从半导体晶片选择多个区域的区域系统。 金色模板系统为每个区域生成区域金色模板，以允许将模具图像与来自多个区域的金色模板进行比较。 组金模板系统从区域金模板生成多个组黄金模板，以允许将模具图像与来自多个组金模板的金模板进行比较。