公开(公告)号：US06521509B2

公开(公告)日：2003-02-18

申请号：US09887322

申请日：2001-06-25

申请人： Akinobu Teramoto ,  Kousuke Yagi ,  Hiroshi Umeda

发明人： Akinobu Teramoto ,  Kousuke Yagi ,  Hiroshi Umeda

IPC分类号： H01L2176

CPC分类号： H01L21/76224

摘要： A highly reliable semiconductor device is provided. A silicon nitride film having an opening is formed on a main surface of a silicon substrate. The opening is formed with a side surface. The silicon substrate is etched using the silicon nitride film as a mask to form a trench. The side surface of the silicon nitride film is altered in quality to form a silicon oxide film. A silicon oxide film filling the trench is formed in contact with the silicon oxide film. The silicon nitride film is removed with the silicon oxide film in contact with the silicon oxide film remaining.

公开(公告)号：US06254814B1

公开(公告)日：2001-07-03

申请号：US09248292

申请日：1999-02-11

申请人： Seiichi Ueda ,  Seio Higaki ,  Manabu Sudo ,  Kousuke Yagi ,  Masahiko Funaki

发明人： Seiichi Ueda ,  Seio Higaki ,  Manabu Sudo ,  Kousuke Yagi ,  Masahiko Funaki

IPC分类号： B27N502

CPC分类号： C08L1/02 ,  C08L3/02 ,  C08L29/04 ,  C08L2666/02

摘要： There is disclosed a molding compound for making an article including a cellulose fiber, which is prepared by mixing a cellulose fiber added with at least starch, water and a long chain fatty acid salt of a non-alkali metal. There is also described a method for molding an article including a cellulose fiber by employing the above compound and, further, a mold for molding an article including a cellulose fiber with a cavity formed by a stationary side and a movable side which is used therefore.

摘要翻译： 公开了一种用于制造包含纤维素纤维的制品的模塑料，其通过混合至少加入淀粉，水和非碱金属的长链脂肪酸盐的纤维素纤维来制备。 还描述了通过使用上述化合物模制包含纤维素纤维的制品的方法，并且还涉及一种用于模制包含纤维素纤维的制品的模具，其中所述纤维素纤维具有由固定侧和活动侧形成的空腔，因此使用该模具。